Process Engineer III— Advanced Patterning

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Job Description

Process Engineer III— Advanced Patterning

Job Type: Full‑time
 

About the Role

We are seeking a hands‑on Process Engineer to develop and transfer next‑generation patterning processes for EUV and electron‑beam lithography. The role works closely with lithography, films, etch and integration teams to deliver manufacturable solutions and accelerate customer adoption of advanced patterning technologies.

Key Responsibilities

• Develop and optimize patterning process flows for EUV and e‑beam exposures.
• Design and execute lithography experiments: contrast curves, dose‑to‑clear, CD uniformity, LER/LWR, defectivity, and outgassing assessments.
• Deposit and characterize thin films using PVD, PECVD, ALD, and spin‑on methods; correlate deposition conditions with lithographic performance.
• Operate and interpret metrology and microscopy: CD‑SEM, TEM, AFM, XRD, XPS, XRR, spectroscopic ellipsometry, Raman, FT‑IR, EDX.
• Analyze experimental and metrology data using statistical methods to identify trends, perform root‑cause analysis, and establish robust process windows.
• Support integration and contamination control studies for scanner and synchrotron exposures.
• Prepare technical reports, SOPs, and transfer packages for pilot and production adoption.
• Ensure adherence to safety and cleanroom protocols.

Required Qualifications (drawn from the document/resume)

• Ph.D. (strongly preferred) or M.S. in Nanoscale Science, Materials Science, Chemical Engineering, Chemistry, or related field.
• Hands‑on experience with EUV and electron‑beam lithography and resist evaluation (EUV XIL‑II Beamline, ASML NXE exposures, JBX‑6300FS EBL.
• Practical experience with PVD, PECVD, ALD, spin-on and resist processing (wet and dry development).
• Proficiency with CD‑SEM and advanced metrology techniques (SEM, TEM, AFM, XRD, XPS, XRR, ellipsometry, Raman, FT‑IR, EDX, NMR).
• Demonstrated ability to analyze experimental/metrology data and apply statistical/process optimization.
• Strong written and verbal communication; experience collaborating with multi‑functional teams.
• Hands-on experience with resist chemistries not limited to chemically amplified resists, organometallic resist and conventional chemistries.

Preferred Qualifications

Industry internship/experience at an equipment vendor or fab.

• Experience operating ASML NXE:3400B, JBX‑6300FS, EUV outgassing systems, and synchrotron beamline exposures.
• Track record of peer‑reviewed publications or conference presentations in lithography, resist chemistry, or thin films.

Competencies & Behaviors

• Data‑driven problem solving and rigorous root‑cause analysis.
• Strong documentation discipline and ability to transfer lab flows to production.
• Collaborative team player with attention to safety and detail.

Education & Experience

• Ph.D. (preferred) or M.S.; B.S. with significant relevant experience considered.
• Relevant R&D, process development experience in 300mm fab/cleanroom.

Working Conditions & Travel

• Cleanroom and laboratory environment; occasional travel to customer sites and synchrotron facilities.
• Compliance with safety and cleanroom protocols required.

Physical Demands and Work Conditions
The physical demands described herein are representative of those that must be met by an employee to successfully perform the essential functions of this job. This job operates in an office setting. This role routinely uses standard office equipment such as computers, phones, photocopiers, and filing cabinets. This is a largely sedentary role; however, some filing is required, which would require the ability to lift files, open filing cabinets and bend or stand as necessary. This position requires the ability to occasionally lift office products and supplies, up to 35 pounds. This position also requires 4 to 6 hours per day at a computer screen/keyboard.

Salary Ranges

Individual pay is determined based on multiple factors, including but not limited to location, experience, skills, job-related knowledge, relevant education, certifications, and/or training.  In addition to base salary, we offer (full time regular employees ) a comprehensive benefits package and for certain roles eligibility in our bonus plan and long-term incentives as applicable.  The talent advisor can share more details about total compensation for the role in your location during the hiring process.

Diversity creates an innovative culture. TEL US is an Equal Employment Opportunity / Affirmative Action employer and all qualified applicants will receive consideration for employment without regard to race, color, religion, sex, age, national origin, protected veteran status, disability status, sexual orientation, gender identity or expression, marital status, genetic information, or any other characteristic protected by law.

Subsidiary